{"id":"arxiv:2106.11808","kind":"article","title":"Fully CMOS-compatible passive TiO2-based memristor crossbars for in-memory computing","authors":["Abdelouadoud El Mesoudy","Gwénaëlle Lamri","Raphaël Dawant","Javier Arias-Zapata","Pierre Gliech","Yann Beilliard","Serge Ecoffey","Andreas Ruediger","Fabien Alibart","Dominique Drouin"],"author_count":10,"year":2021,"published":"2021-06-22","venue":"Microelectronic Engineering","cited_by":48,"doi":"10.1016/j.mee.2021.111706","arxiv_id":"2106.11808","nct_id":null,"source_url":"https://arxiv.org/abs/2106.11808","archive_url":"https://space-kitty.com/papers/arxiv:2106.11808","updated":"2021-12-08","pmid":null,"pmcid":null,"openalex_id":"W3175542906","pdf_url":"https://arxiv.org/pdf/2106.11808","abstract":"Brain-inspired computing and neuromorphic hardware are promising approaches that offer great potential to overcome limitations faced by current computing paradigms based on traditional von-Neumann architecture. In this regard, interest in developing memristor crossbar arrays has increased due to their ability to natively perform in-memory computing and fundamental synaptic operations required for neural network implementation. For optimal efficiency, crossbar-based circuits need to be compatible with fabrication processes and materials of industrial CMOS technologies. Herein, we report a complete CMOS-compatible fabrication process of TiO2-based passive memristor crossbars with 700 nm wide electrodes. We show successful bottom electrode fabrication by a damascene process, resulting in an optimised topography and a surface roughness as low as 1.1 nm. DC sweeps and voltage pulse programming yield statistical results related to synaptic-like multilevel switching. Both cycle-to-cycle and device-to-device variability are investigated. Analogue programming of the conductance using sequences of 200 ns voltage pulses suggest that the fabricated memories have a multilevel capacity of at least 3 bits due to the cycle-to-cycle reproducibility.","abstract_license":"CC0-1.0 (arXiv descriptive metadata)","license":null,"is_open_access":false,"retracted":false,"peer_reviewed":null,"categories":["cs.ET","physics.app-ph"],"details":null,"provenance":"arxiv","attribution":"Abstract: arXiv descriptive metadata (CC0). Thank you to arXiv for use of its open access interoperability. This service was not reviewed or approved by, nor does it necessarily express or reflect the policies or opinions of, arXiv.","topics":[{"slug":"semiconductor-frontiers","name":"Semiconductor Device Frontiers","domain_slug":"materials"}],"cited_in_dossiers":[]}