# Unusual Cathode Erosion Patterns Observed for Steered Arc Sources

Preprint · Jonathan Kolbeck, André Anders

- Archive id: arxiv:1402.2945
- Published: 2014-02-12
- DOI: https://doi.org/10.1109/tps.2014.2328333
- arXiv: https://arxiv.org/abs/1402.2945
- Source URL: https://arxiv.org/abs/1402.2945
- PDF: https://arxiv.org/pdf/1402.2945
- Provenance: arxiv

## Abstract

A cathodic arc source with a magnetron-type magnetic field was investigated for stability, erosion, and compatibility with a linear macroparticle filter. Here we report about unusual arc spot erosion patterns, which were narrow (~ 2 mm) with periodic pits when operating in argon, and broad (~ 10 mm) with periodic groves and ridges when operating in an argon and oxygen mixtures. These observations can be correlated with the ignition probability for type 2 and type 1 arc spots, respectively.

_Abstract reproduced under CC0-1.0 (arXiv descriptive metadata)._

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