# Broadband high-efficiency dielectric metasurfaces for the visible spectrum

Article · Robert Charles Devlin, Mohammadreza Khorasaninejad, Wei Ting Chen, Jaewon Oh, Federico Capasso

- Archive id: arxiv:1603.02735
- Published: 2016-09-06
- Venue: Proceedings of the National Academy of Sciences
- DOI: https://doi.org/10.1073/pnas.1611740113
- arXiv: https://arxiv.org/abs/1603.02735
- PMID: 27601634
- Citations: 612
- Source URL: https://doi.org/10.1073/pnas.1611740113
- PDF: https://arxiv.org/pdf/1603.02735
- Provenance: openalex+arxiv

## Abstract

Metasurfaces are planar optical elements that hold promise for overcoming the limitations of refractive and conventional diffractive optics1-3. Dielectric metasurfaces demonstrated thus far4-10 are limited to transparency windows at infrared wavelengths because of significant optical absorption and loss at visible wavelengths. It is critical that new materials and fabrication techniques be developed for dielectric metasurfaces at visible wavelengths to enable applications such as three-dimensional displays, wearable optics and planar optical systems11. Here, we demonstrate high performance titanium dioxide dielectric metasurfaces in the form of holograms for red, green and blue wavelengths with record absolute efficiency (\>78%). We use atomic layer deposition of amorphous titanium dioxide that exhibits low surface roughness of 0.738 nm and ideal optical properties. To fabricate the metasurfaces we use a lift-off-like process that allows us to produce highly anisotropic nanofins with shape birefringence. This process is applicable to any optical element and can be implemented using a broad class of materials.

_Abstract reproduced under CC0-1.0 (arXiv descriptive metadata)._

Topics: [Metamaterials, Nanophotonics & Integrated Photonics](https://space-kitty.com/topics/metamaterials-photonics)

---
Space Kitty Archive · https://space-kitty.com · API: https://space-kitty.com/api/v1 · MCP: https://space-kitty.com/mcp · Premium: $0.20/request via x402 (Base Sepolia (testnet)). Metadata: arXiv (CC0), OpenAlex (CC0), Europe PMC (CC BY/CC0 works), ClinicalTrials.gov.