# Using ultra-thin parylene films as an organic gate insulator in nanowire field-effect transistors

Article · J. G. Gluschke, J. Seidl, R. W. Lyttleton, D. J. Carrad, J. W. Cochrane, S. Lehmann, L. Samuelson, A. P. Micolich

- Archive id: arxiv:1809.10471
- Published: 2018-09-27
- Venue: Nano Letters 18, 4431-4439 (2018)
- DOI: https://doi.org/10.1021/acs.nanolett.8b01519
- arXiv: https://arxiv.org/abs/1809.10471
- Citations: 13
- Source URL: https://arxiv.org/abs/1809.10471
- PDF: https://arxiv.org/pdf/1809.10471
- Provenance: arxiv

## Abstract

We report the development of nanowire field-effect transistors featuring an ultra-thin parylene film as a polymer gate insulator. The room temperature, gas-phase deposition of parylene is an attractive alternative to oxide insulators prepared at high temperatures using atomic layer deposition. We discuss our custom-built parylene deposition system, which is designed for reliable and controlled deposition of \<100 nm thick parylene films on III-V nanowires standing vertically on a growth substrate or horizontally on a device substrate. The former case gives conformally-coated nanowires, which we used to produce functional $Ω$-gate and gate-all-around structures. These give sub-threshold swings as low as 140 mV/dec and on/off ratios exceeding $10^3$ at room temperature. For the gate-all-around structure, we developed a novel fabrication strategy that overcomes some of the limitations with previous lateral wrap-gate nanowire transistors. Finally, we show that parylene can be deposited over chemically-treated nanowire surfaces; a feature generally not possible with oxides produced by atomic layer deposition due to the surface \`self-cleaning' effect. Our results highlight the potential for parylene as an alternative ultra-thin insulator in nanoscale electronic devices more broadly, with potential applications extending into nanobioelectronics due to parylene's well-established biocompatible properties.

_Abstract reproduced under CC0-1.0 (arXiv descriptive metadata)._

Topics: [Semiconductor Device Frontiers](https://space-kitty.com/topics/semiconductor-frontiers)

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