# Twenty-nine million Intrinsic Q-factor Monolithic Microresonators on Thin Film Lithium Niobate

Preprint · Xinrui Zhu, Yaowen Hu, Shengyuan Lu, Hana K. Warner, Xudong Li, Yunxiang Song, Leticia Magalhaes, Amirhassan Shams-Ansari, Neil Sinclair, Marko Loncar

- Archive id: arxiv:2402.16161
- Published: 2024-02-25
- arXiv: https://arxiv.org/abs/2402.16161
- Citations: 2
- Source URL: https://arxiv.org/abs/2402.16161
- PDF: https://arxiv.org/pdf/2402.16161
- Provenance: arxiv

## Abstract

The recent emergence of thin-film lithium niobate (TFLN) has extended the landscape of integrated photonics. This has been enabled by the commercialization of TFLN wafers and advanced nanofabrication of TFLN such as high-quality dry etching. However, fabrication imperfections still limit the propagation loss to a few dB/m, restricting the impact of this platform. Here, we demonstrate TFLN microresonators with a record-high intrinsic quality (Q) factor of twenty-nine million, corresponding to an ultra-low propagation loss of 1.3 dB/m. We present spectral analysis and the statistical distribution of Q factors across different resonator geometries. Our work pushes the fabrication limits of TFLN photonics to achieve a Q factor within one order of magnitude of the material limit.

_Abstract reproduced under CC0-1.0 (arXiv descriptive metadata)._

Topics: [Metamaterials, Nanophotonics & Integrated Photonics](https://space-kitty.com/topics/metamaterials-photonics)

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