# Uniform and ultrathin high-κ gate dielectrics for two-dimensional electronic devices

Article · Weisheng Li, Jian Feng Zhou, Songhua Cai, Zhihao Yu, Jialin Zhang, Nan Fang, Taotao Li, Yun Wu, Tangsheng Chen, Xiaoyu Xie, Haibo Ma, Ke Yan, Ningxuan Dai, Xiangjin Wu, Huijuan Zhao, Zixuan Wang, Daowei He, Lijia Pan, Yi Shi, Peng Wang, Wei Chen, Kosuke Nagashio, Xiangfeng Duan, Xinran Wang

- Archive id: doi:10.1038/s41928-019-0334-y
- Published: 2019-12-09
- Venue: Nature Electronics
- DOI: https://doi.org/10.1038/s41928-019-0334-y
- Citations: 460
- Source URL: https://doi.org/10.1038/s41928-019-0334-y
- Provenance: openalex

_Abstract not reproduced: its license does not permit redistribution. See the source URL._

Topics: [Semiconductor Device Frontiers](https://space-kitty.com/topics/semiconductor-frontiers)

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