Preprint: not peer reviewed. Results may change in later versions.
Abstract
A cathodic arc source with a magnetron-type magnetic field was investigated for stability, erosion, and compatibility with a linear macroparticle filter. Here we report about unusual arc spot erosion patterns, which were narrow (~ 2 mm) with periodic pits when operating in argon, and broad (~ 10 mm) with periodic groves and ridges when operating in an argon and oxygen mixtures. These observations can be correlated with the ignition probability for type 2 and type 1 arc spots, respectively.
Abstract: arXiv descriptive metadata (CC0). Thank you to arXiv for use of its open access interoperability. This service was not reviewed or approved by, nor does it necessarily express or reflect the policies or opinions of, arXiv.
Record
- Archive ID
- arxiv:1402.2945
- Published
- Feb 12, 2014
- DOI
- 10.1109/tps.2014.2328333
- arXiv
- 1402.2945
- Categories
- physics.plasm-ph
- Provenance
- arxiv