Gate-Tunable Conducting Oxide Metasurfaces

Abstract

Metasurfaces composed of planar arrays of sub-wavelength artificial structures show promise for extraordinary light manipulation; they have yielded novel ultrathin optical components such as flat lenses, wave plates, holographic surfaces and orbital angular momentum manipulation and detection over a broad range of electromagnetic spectrum. However the optical properties of metasurfaces developed to date do not allow for versatile tunability of reflected or transmitted wave amplitude and phase after fabrication, thus limiting their use in a wide range of applications. Here, we experimentally demonstrate a gate-tunable metasurface that enables dynamic electrical control of the phase and amplitude of the plane wave reflected from the metasurface. Tunability arises from field-effect modulation of the complex refractive index of conducting oxide layers incorporated into metasurface antenna elements which are configured in a reflectarray geometry. We measure a phase shift of π and ~ 30% change in the reflectance by applying 2.5 V gate bias. Additionally, we demonstrate modulation at frequencies exceeding 10 MHz, and electrical switching of +/-1 order diffracted beams by electrical control over subgroups of metasurface elements, a basic requirement for electrically tunable beam-steering phased array metasurfaces. The proposed tunable metasurface design with high optical quality and high speed dynamic phase modulation suggests applications in next generation ultrathin optical components for imaging and sensing technologies, such as reconfigurable beam steering devices, dynamic holograms, tunable ultrathin lens, nano-projectors, and nanoscale spatial light modulators. Importantly, our design allows complete integration with electronics and hence electrical addressability of individual metasurface elements.

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